MEMS Materials and Processes Handbook
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It features 35 international contributing authors who are MEMS leaders in academic, industrial and government laboratory settings. The processes section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMS.
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The effects of processing conditions on material properties are covered where applicable, illustrating the interdependence and multidisciplinary nature of MEMS fabrication. Unique feature: step-by-step fabrication recipes, tricks, arts and secrets Not only does the book provide the reader with a broad understanding of the basics of materials and processes, it also gives practical insight into the workings and standard procedures carried out in research labs and production facilities on a daily basis.
As a particularly diverse and multidisciplinary field of research, MEMS presents a vast set of challenges relative to typical integrated circuit fabrication and design.
While a wealth of knowledge exists in the MEMS community, much of it is most readily accessed by informal, non-methodological means such as discussions with colleagues at conferences. Readers will benefit from the identification and explanation of MEMS fabrication tricks, arts and secrets. Peter Ramm Prof.
Maaike M. First published: 9 February About this book The focus behind this book on wafer bonding is the fast paced changes in the research and development in three-dimensional 3D integration, temporary bonding and micro-electro-mechanical systems MEMS with new functional layers. Written by authors and edited by a team from microsystems companies and industry-near research organizations, this handbook and reference presents dependable, first-hand information on bonding technologies.
Part II summarizes the key wafer bonding applications developed recently, that is, 3D integration, MEMS, and temporary bonding, to give readers a taste of the significant applications of wafer bonding technologies. This book is aimed at materials scientists, semiconductor physicists, the semiconductor industry, IT engineers, electrical engineers, and libraries. Author Bios Dr.
Pinyen Lin (Editor of MEMS Materials and Processes Handbook)
Peter Ramm is head of the department Device and 3D Integration of Fraunhofer EMFT in Munich, Germany, where he is responsible for process integration of innovative devices and heterogeneous systems with a specific focus on 3D integration technologies. Ramm received the physics and Dr.
Peter Ramm is author or co-author of over publications and 24 patents. New citations to this author. New articles related to this author's research. Email address for updates. My profile My library Metrics Alerts.
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